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        Vacuum Equipment

        Vacuum Pads ZP3/ZP2/ZP Series - Select from the Workpieces

        Select from the Workpieces:IC Parts

        Precautions

        Static electricity free??? Use conductive materials.
        Since ozone is generated when an ionizer or etc. is used, avoid using NBR and conductive NBR.

        <When the workpiece and pad do not separate>

        • Consider reducing the vacuum pressure.
        • Consider revising the release air circuit.
        • Consider changing to a blast-type pad specification.
        • Consider reducing the pad diameter.

        Short-type Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■Space-saving in the height direction

        MU Flat ZP2 φ2, φ3.5, φ4, φ5, φ6, φ8, φ10, φ15 Details
        EU Flat ZP2 φ2, φ4, φ6, φ8, φ15 Details
        AU Flat ZP2 φ2, φ3, φ4, φ6, φ8 Details

        Compact Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■Flat
        For adsorption of general workpieces. For adsorption of workpieces with flat and not deformed surface.

        ■Flat with rib
        For a workpiece which is likely to deform or for releasing a workpiece certainly.

        ■Thin flat
        For a workpiece which is likely to deform.

        ■Bellows
        For adsorption of workpieces with inclined surface.

        U Flat ZP φ2, φ4, φ6, φ8 Details
        ZP2 φ3, φ4 - - Details
        ZP3 φ1.5, φ3.5 Details
        C Flat with rib ZP2 φ6, φ7, φ8 - - Details
        UT Thin flat ZP2 φ5, φ6 - - Details
        B Bellows ZP φ6, φ8 - Details
        ZP2 φ4,φ6, φ8 - - Details
        ZP3 φ4, φ6, φ8 Details

        Flat Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer
        (ZP)
        WEB Catalog

        ■For adsorption of general workpieces.
        ■For adsorption of work pieces with flat and not deformed surface.

        U flat ZP φ2, φ4, φ6, φ8, φ10, φ13,
        φ16, φ20, φ25, φ32, φ40, φ50
        Details
        U Flat ZP2 φ3, φ4 Details
        U Flat ZP3 φ1.5, φ3.5 Details
        MU Flat ZP2 φ2, φ3.5, φ4, φ5, φ6, φ8, φ10, φ15 - Details
        EU Flat ZP2 φ2, φ4, φ6, φ8, φ15 - Details
        AU Flat ZP2 φ2, φ3, φ4, φ6, φ8 - - Details

        Flat Pad with Rib

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■For a workpiece which is likely to deform.
        ■For releasing a workpiece certainly.

        C Flat Pad with rib ZP φ10, φ13, φ16, φ20, φ25, φ32, φ40, φ50 Details
        C Flat Pad with rib ZP2 φ6, φ7, φ8 Details

        Flat Pad with Groove

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■For a workpiece which is likely to deform.
        ■For releasing a workpiece certainly.

        UM Flat with groove ZP3 φ4, φ6, φ8, φ10, φ13, φ16 Details

        ■For adsorption of general workpieces.
        ■To be used when adsorption surface of the workpiece is flat and not deformed.

        UM Flat type with groove ZP3E φ32,φ40,φ50,φ63,φ80,φ100,φ125 Details

        Thin Flat Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■For a workpiece which is likely to deform.

        UT Thin flat ZP φ10, φ13, φ16 Details
        UT Thin flat ZP2 φ5, φ6 φ11, φ14, φ18, φ20 Details

        Thin Flat Pad with Rib

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■For a workpiece which is likely to deform.
        ■For releasing a workpiece certainly.

        CT Thin flat with rib ZP φ10, φ13, φ16 Details

        Nozzle Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■For adsorption of small components such as IC chips.

        AN Nozzle ZP2 φ0.8, φ1.1 - Details

        Blast-type Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■Blast treatment to create finely uneven surface for adsorption.

        Workpieces can be removed easily.

        U Flat ZP2 φ4 - - Details
        C Flat with rib ZP2 φ6, φ8 - - Details
        UM Flat with groove ZP3 φ4,φ6,φ8,φ10,φ13,φ16 Details
        B Bellows ZP2 φ6, φ8 - - Details
        J Bellows
        (Multistage type)
        ZP2 φ10, φ15, φ25, φ30 - - Details
        MU Flat ZP2 φ2, φ3.5, φ4, φ5,
        φ6, φ8, φ10, φ15
        - Details
        EU Flat ZP2 φ2, φ4, φ6 - Details
        MT Thin flat
        (With groove)
        ZP2 φ10, φ15, φ20, φ25, φ30 - Details
        MB Bellows ZP2 φ4, φ6, φ8,
        φ10, φ15, φ20
        - Details

        Oval Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■For work pieces with limitations on the adsorption surface.

        U Oval ZP 2×4, 3.5×7, 4×10 Details
        W Oval ZP2 3.5×7, 4×10, 4×20, 4×30, 5×10, 5×20,
        5×30, 6×10, 6×20, 6×30, 8×20, 8×30
        Details

        Mark-free Pad

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■For use where adsorption marks must not be left on workpieces.

        U Flat ZP2 φ4, φ6, φ8, φ10, φ16, φ25, φ32, φ40, φ50 - - Details
        H Heavy-duty
        (Flat with rib)
        ZP2 φ40, φ50, φ63, φ80, φ100, φ125 - - Details

        Resin Attachment

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■Mark-free.
        ■Prevents sticking of the rubber and the workpieces.

        K Bellows ZP2 φ6, φ8, φ10, φ13, φ16, φ20, φ25, φ32 - - Details

        Pad with Ball Spline Buffer

        Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

        ■Ball spline guide is used to the buffer.

        U Flat ZP2 φ2, φ4, φ6, φ8 Details

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